Thermal flow sensor, gas sensor comprising at least one such sensor and Pirani gauge comprising at least one such sensor
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United States of America Patent
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Jul 18, 2017
Grant Date -
Sep 3, 2015
app pub date -
Sep 17, 2013
filing date -
Sep 19, 2012
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Abstract
A thermal flow sensor comprising at least one first element (2) suspended with respect to a support, said first suspended element (2) being of an electrically conductive material, first means (6) for biasing said suspended element (2) and first means (8) for measuring the variation of the electric voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first biasing means (6) are formed by an alternating current source the intensity of which provides heating of the first suspended element (2) by Joule effect.
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