OPTICAL INTEGRATED CIRCUIT, AND INSPECTION METHOD OF OPTICAL DEVICE IN OPTICAL INTEGRATED CIRCUIT
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United States of America Patent
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Sep 3, 2015
app pub date -
Jun 25, 2013
filing date -
Aug 29, 2012
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Abstract
The present invention simply and reliably inspects characteristics of a plurality of optical devices in a wafer state. This optical integrated circuit is provided with: an optical coupler having light inputted thereto from the surface of a semiconductor substrate; an optical waveguide that propagates inspection light inputted to the optical coupler; a light distributor that distributes inspection light to the optical waveguides, said inspection light having been propagated by means of the optical waveguide; and optical devices that are respectively provided on the optical waveguides having the light distributed thereto using the light distributor.
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