TEMPERATURE DETECTION DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
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United States of America Patent
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Issued Date -
Sep 3, 2015
app pub date -
Sep 10, 2014
filing date -
Feb 28, 2014
priority date (Note) -
Abandoned
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Abstract
According to one embodiment, a temperature detection device includes a plurality of thermocouples, an insulating member, and an exterior protective tube. The thermocouple is configured to include two measurement wires as a pair. The two measurement wires are joined at a temperature measuring contact point. The insulating member is formed with a plurality of through-holes. The insulating member holds the plurality of thermocouples. In each of the plurality of thermocouples, each of the measurement wires is inserted to different through-hole so that the measurement wires are insulated from each other. The exterior protective tube interiorly accommodates the thermocouples and the insulating member.
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