Electrochemical polishing solution, process for electrochemically polishing graphite gate electrode and graphite gate electrode
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United States of America Patent
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Jan 24, 2017
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Sep 3, 2015
app pub date -
Jun 26, 2014
filing date -
Feb 28, 2014
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Abstract
The invention discloses an electrochemical polishing solution, a process for electrochemically polishing a graphite gate electrode and a graphite gate electrode, which are used for providing an electrochemical polishing solution and a polishing process to efficiently remove the contaminant on the surface of a gate electrode and improve the quality of the gate electrode. Said electrochemical polishing solution comprises 900-1000 parts by weight of water; 195-205 parts by weight of an alkaline metal hydroxide; 49-51 parts by weight of a weak acid salt; and 294-306 parts by weight of an additive.
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