Polishing apparatus and polishing method
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United States of America Patent
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Dec 5, 2017
Grant Date -
Sep 3, 2015
app pub date -
Mar 3, 2014
filing date -
Mar 3, 2014
priority date (Note) -
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Abstract
Embodiments of a polishing apparatus are provided. The polishing apparatus includes a polishing pad having a polishing surface. The polishing apparatus also includes a dispensing device including a dispensing arm located over the polishing pad and a liquid nozzle disposed on the dispensing arm. The liquid nozzle is configured to dispense washing liquid onto the polishing surface along a dispensing direction. The dispensing direction has an acute angle with respect to the polishing surface.
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