Production method for deposition mask and deposition mask

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United States of America Patent

PATENT NO 9844835
SERIAL NO

14713519

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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To provide a production method including: a first step of forming a mask member in which a resin film and a magnetic metal member, which has first through-holes and second through-holes, are brought into close contact; a second step in which a peripheral edge of the magnetic metal member is bonded to one end face of a frame; and a third step in which a portion of the film in each first through-hole is irradiated with laser light to form an opening pattern, and a portion of the film in each second through-hole is irradiated with laser light to form a mask-side alignment mark.

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Patent Owner(s)

Patent OwnerAddress
V TECHNOLOGY CO LTDKANAGAWA KANAGAWA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mizumura, Michinobu Yokohama, JP 113 613

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