Method and apparatus for material processing using multiple filamentation of burst ultrafast laser pulses

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United States of America Patent

PATENT NO 9938187
SERIAL NO

14629327

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Abstract

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A method of drilling multiple orifices in and texturing a substrate is disclosed and includes the following steps. Ultrafast laser pulses are passed through a beam splitting diffractive optical element and then multiple beams are passed through a distributive-focus lens focusing assembly. The relative distance and/or angle of said distributive-focus lens focusing assembly in relation to the laser source is adjusted focusing the pulses in a distributed focus configuration creating a principal focal waist and at least one secondary focal waist. The fluence level of the at least one secondary focal waists is adjusted such that it is or they are of sufficient intensity and number to ensure propagation of multiple filaments in the substrate. Photoacoustic compressive machining is performed and forms multiple volume(s) within the substrate.

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Patent Owner(s)

Patent OwnerAddress
ROFIN-SINAR TECHNOLOGIES LLC40984 CONCEPT DRIVE PLYMOUTH MI 48170

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hosseini, S Abbas Orlando, US 27 864

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