Chip for plasma generation, plasma generator, and plasma spectrometry method
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United States of America Patent
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Apr 18, 2017
Issued Date -
N/A
app pub date -
Feb 26, 2015
filing date -
Feb 28, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A chip for plasma generation, a plasma generator, and a plasma spectrometry method, having high reproducibility of plasma light emission are described, wherein the chip for plasma generation contains a channel, wherein the channel has a first region, a narrow portion, and a second region, wherein the narrow portion is in communication with the first region and the second region and has a cross-sectional area smaller than the first region and the second region, and the chip further includes an air bubble movement prevention unit that prevents air bubbles generated in the narrow portion from moving from the narrow portion toward the upstream side of the narrow portion.
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Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Oct 18, 2024 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 18, 2028 |
