Apparatus for generating plasma

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United States of America Patent

PATENT NO 9627167
APP PUB NO 20150245458A1
SERIAL NO

14631766

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Abstract

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Provided herein an apparatus for generating plasma, the apparatus including a nozzle array, first electrode, and housing. The nozzle discharges plasma. The first electrode is disposed to surround the nozzle array. The housing is disposed to surround the nozzle array and first electrode. The nozzle includes a plurality of nozzles disposed adjacent to one another and in the form of an array, each nozzle configured to discharge plasma. Therefore, it is possible to generate a large size plasma evenly and stably.

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Patent Owner(s)

Patent OwnerAddress
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEDAEJEON 305-700

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jang, Won Ick Daejeon, KR 32 697
Kim, Yark Yeon Daejeon, KR 37 114
Lee, Bong Kuk Daejeon, KR 9 17
Yoon, Yong Sun Daejeon, KR 18 182
Yu, Han Young Daejeon, KR 48 254

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