VIBRATOR, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC APPLIANCE
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United States of America Patent
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Issued Date -
Aug 27, 2015
app pub date -
Feb 18, 2015
filing date -
Feb 21, 2014
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Abstract
A vibrator according to the invention includes: a substrate; a lower electrode that is formed on the substrate and has a through hole formed therein; an upper electrode that is disposed above the lower electrode so as to be spaced apart from the lower electrode, and includes a protruding portion that protrudes toward the through hole; and a facing portion that is formed on the substrate, and faces the protruding portion. A distance between the facing portion and the protruding portion is smaller than a distance between the lower electrode and the upper electrode.
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