Gas laser oscillator controlling adjusted level of laser power supply
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United States of America Patent
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Jan 26, 2016
Grant Date -
Aug 27, 2015
app pub date -
Feb 24, 2015
filing date -
Feb 27, 2014
priority date (Note) -
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Abstract
A gas laser oscillator including discharge tubes, main discharge electrodes, auxiliary electrodes, an output mirror which outputs a laser, and a mechanical shutter which cuts off the laser output from the output mirror. To maintain the auxiliary discharge in the state where the laser output is zero, the base discharge command is set to a first command value when the mechanical shutter is closed, and is set to a second command value smaller than the first command value when the mechanical shutter is opened.
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