Electron Microscope and Sample Movement Device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Aug 27, 2015
app pub date -
Jun 26, 2013
filing date -
Aug 20, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present invention is intended to reduce drift in a sample which occurs because of distortion in an O-ring which seals off from the atmosphere a sample chamber in which vacuum is retained. Provided is an electron microscope, wherein a sample holder (2) is inserted in a column (1), comprising: an O-ring (4) which makes airtight the column (1) of the electron microscope and the sample holder (2); a slider tube (30) which slides in the longitudinal direction of the sample holder (2) and positions the sample holder in the longitudinal direction; a bellows (32) which makes airtight the slider tube (30) and the column (1); a means (10) for driving the slider (30) in the longitudinal direction of the sample holder (2); and a holder umping part (40) which positions the sample holder (2) in the longitudinal direction. The electron microscope further comprises a sample movement device which has an elastic material (31) which connects the holder umping part (40) and the slider tube (30).
First Claim
Other Claims data not available