Reticle Cleaning by Means of Sticky Surface

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20150241797A1
SERIAL NO

14423089

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Methods and systems are described for cleaning contamination from the surface of an object within a lithographic apparatus. A lithographic apparatus is provided that includes an illumination system configured to condition a radiation beam, a support constructed to hold a patterning device (302), the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The lithographic apparatus further includes a cleaning system (500) for cleaning particles off of a surface of either the support or the patterning device. The cleaning system includes a cleaning surface (502) designed to contact the surface of either the support or the patterning device.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VHOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT

International Classification(s)

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  • 2013 Application Filing Year
  • B08B Class
  • 729 Applications Filed
  • 646 Patents Issued To-Date
  • 88.62 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201320142015201620172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Albright, Ronald Peter Norwalk, US 6 18
Delmastro, Peter A New Milford, US 10 65
Mason, Christopher J Newtown, US 10 59
Onvlee, Johannes 's-Hertogenbosch, NL 51 493
Singh, Sanjeev Kumar Danbury, US 43 360

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Patent Citation Ranking

  • 8 Citation Count
  • B08B Class
  • 16.82 % this patent is cited more than
  • 10 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges12854261184331101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 800255075100125150175200225250275300325350375400425450475500525550575

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