Reticle Cleaning by Means of Sticky Surface
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Aug 27, 2015
app pub date -
Jul 30, 2013
filing date -
Aug 31, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Methods and systems are described for cleaning contamination from the surface of an object within a lithographic apparatus. A lithographic apparatus is provided that includes an illumination system configured to condition a radiation beam, a support constructed to hold a patterning device (302), the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The lithographic apparatus further includes a cleaning system (500) for cleaning particles off of a surface of either the support or the patterning device. The cleaning system includes a cleaning surface (502) designed to contact the surface of either the support or the patterning device.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ASML HOLDING N V | HOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT |
International Classification(s)

- 2013 Application Filing Year
- B08B Class
- 729 Applications Filed
- 646 Patents Issued To-Date
- 88.62 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Albright, Ronald Peter | Norwalk, US | 6 | 18 |
# of filed Patents : 6 Total Citations : 18 | |||
Delmastro, Peter A | New Milford, US | 10 | 65 |
# of filed Patents : 10 Total Citations : 65 | |||
Mason, Christopher J | Newtown, US | 10 | 59 |
# of filed Patents : 10 Total Citations : 59 | |||
Onvlee, Johannes | 's-Hertogenbosch, NL | 51 | 493 |
# of filed Patents : 51 Total Citations : 493 | |||
Singh, Sanjeev Kumar | Danbury, US | 43 | 360 |
# of filed Patents : 43 Total Citations : 360 |
Cited Art Landscape
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Patent Citation Ranking
- 8 Citation Count
- B08B Class
- 16.82 % this patent is cited more than
- 10 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 27, 2027 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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