Precise probe placement in automated scanning probe microscopy systems
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United States of America Patent
Stats
-
Jun 12, 2018
Issued Date -
Aug 27, 2015
app pub date -
Feb 24, 2015
filing date -
Feb 24, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.
First Claim
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International Classification(s)
- 2015 Application Filing Year
- G01Q Class
- 101 Applications Filed
- 89 Patents Issued To-Date
- 88.12 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 7 Age
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