Functional element, electronic apparatus, and moving object
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United States of America Patent
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Jun 11, 2019
Grant Date -
Aug 27, 2015
app pub date -
Feb 23, 2015
filing date -
Feb 25, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A functional element includes: a substrate; a movable body that includes a movable electrode portion; a support portion that supports the movable body; a first fixed electrode portion that is disposed on the substrate and a portion of which faces a first portion as one of portions of the movable body; a second fixed electrode portion that is disposed on the substrate and a portion of which faces a second portion as the other portion of the movable body; and a third fixed electrode portion that is disposed on the substrate and a portion of which faces the first portion. An opening that faces a region of the substrate between the first fixed electrode portion and the third fixed electrode portion is provided in the movable body, and the width of the opening is equal to or more than the width of the region.
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