MICROELECTROMECHANICAL DEVICE WITH MOTION LIMITERS
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United States of America Patent
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Aug 27, 2015
app pub date -
Feb 25, 2015
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Feb 26, 2014
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Abstract
A microelectromechanical device that comprises a first structural layer, and a movable mass suspended to a primary out-of plane motion relative the first structural layer. A cantilever motion limiter structure is etched into the movable mass, and a first stopper element is arranged on the first structural layer, opposite to the cantilever motion limiter structure. Improved mechanical robustness is achieved with optimal use of element space.
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