MICRO ELECTRO MECHANICAL SYSTEMS SENSOR
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United States of America Patent
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Issued Date -
Aug 27, 2015
app pub date -
Jan 21, 2015
filing date -
Feb 27, 2014
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Abandoned
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Abstract
Embodiments of the invention provide a MEMS sensor, including a mass body, a flexible beam coupled with the mass body, and a support part coupled with the flexible beam and floatably supporting the mass body. According to at least one embodiment, the flexible beam is provided with a sensing device configured to detect a physical amount depending on a displacement of the mass body, and a connection part between the flexible beam and the support part is provided with a reinforcement part to relax stress concentration in response to rigidity reinforcement.
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