Microelectromechanical structure with motion limiter
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United States of America Patent
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Aug 16, 2016
Grant Date -
Aug 27, 2015
app pub date -
Feb 25, 2015
filing date -
Feb 26, 2014
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Abstract
A microelectromechanical structure, comprises a first element that includes a first element surface, and a second element that includes a second element surface, and an element gap between the first element surface and the second element surface. At least one of the first element and the second element is mobile. One of the first and second element surfaces includes a convex contact surface and the other one of the first and second element surfaces includes a concave contact surface.
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