Silicone rubber material for soft lithography

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United States of America Patent

PATENT NO 10220563
APP PUB NO 20150239171A1
SERIAL NO

14697687

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Abstract

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The present invention relates to a silicone rubber like material and a printing device including a stamp layer comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer and use thereof in lithographic processes.

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Patent Owner(s)

Patent OwnerAddress
KONINKLIJKE PHILIPS N V5656 AG EINDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Verschuuren, Marcus Antonius Berkel-Enschot, NL 62 411

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