GRINDING APPARATUS, AND GRINDING METHOD
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United States of America Patent
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Aug 27, 2015
app pub date -
Jun 27, 2014
filing date -
Feb 26, 2014
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Abstract
According to one embodiment, a grinding apparatus includes a chuck table, a grinding wheel that is pressed against a plurality of separate ground surfaces of a plurality of workpieces fixed to the chuck table while rotating to grind the workpieces, a measuring device that measures heights of the ground surfaces, and a control device that controls amount of grinding of the workpieces based on the heights of the plurality of ground surfaces measured before grinding the workpieces, and the heights of the plurality of ground surfaces measured after grinding the workpieces.
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