Coating method, coating device and coating generating system
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United States of America Patent
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May 23, 2017
Grant Date -
Aug 27, 2015
app pub date -
Sep 29, 2014
filing date -
Feb 24, 2014
priority date (Note) -
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Abstract
The invention discloses a coating method, a coating device and a coating system. The coating method comprises: collecting a thickness data of a film on inner walls of a coating chamber; and processing the thickness data to obtain the thickness of the film on the inner walls of the coating chamber. With the coating method, the cleaning for the coating device gets smarter, the troublesome of artificially controlling the cleaning in the prior art is eliminated and thus the cleaning efficiency for the coating device is improved.
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