MEMS device with constant capacitance
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United States of America Patent
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May 23, 2017
Grant Date -
Aug 20, 2015
app pub date -
Feb 18, 2014
filing date -
Feb 18, 2014
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Abstract
A MEMS apparatus has a substrate, an input node, an output node, and a MEMS switch between the input node and the output node. The switch selectively connects the input node and the output node, which are electrically isolated when the switch is open. The apparatus also has an input doped region in the substrate and an output doped region in the substrate. The input doped region and output doped region are electrically isolated through the substrate—i.e., the resistance between them inhibits non-negligible current flows between the two doped regions. The input doped region forms an input capacitance with the input node, while the output doped region forms an output capacitance with the output node.
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