Method of charging raw material, method of manufacturing single crystals, and single crystal manufacturing apparatus
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United States of America Patent
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May 16, 2017
Issued Date -
N/A
app pub date -
Oct 28, 2013
filing date -
Nov 20, 2012
priority date (Note) -
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Abstract
A method of charging raw material, includes: storing the material in a recharge tube including a quartz cylinder for storing the material and a conical valve for opening or closing an opening at a lower end of the cylinder; installing the recharge tube storing the raw material in a chamber; and feeding the raw material stored in the recharge tube into the crucible by locating the recharge tube and crucible such that a distance between the lower end of the recharge tube and raw material or melt in the crucible ranges from 200 to 250 mm, and lowering the conical valve to open the opening while simultaneously lowering the crucible such that a ratio CL/SL of the lowering speed of the crucible to the lowering speed of the conical valve ranges from 1.3 to 1.45. The method can inhibit damage of the quartz crucible and recharge tube.
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