FERROELECTRIC FILM AND MANUFACTURING METHOD THEREOF

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United States of America Patent

SERIAL NO

14620519

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Abstract

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To provide a ferroelectric film having improved uniformity in the composition of the film surface and the composition of the entire film, or a manufacturing method thereof. An aspect of the present invention is a ferroelectric film including a ferroelectric coated and sintered crystal film; and a ferroelectric crystal film formed on the ferroelectric coated and sintered crystal film, by a sputtering method, wherein the ferroelectric coated and sintered crystal film is formed by coating a solution having a metal compound containing, in an organic solvent, all of or a part of constituent metals of the ferroelectric crystal film and a partial polycondensation product thereof and by heating the same to be crystallized.

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Patent Owner(s)

Patent OwnerAddress
KRYSTAL INC2-1-17 ASUTOPIA UBE-SHI YAMAGUCHI 755-0152

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HONDA, Yuuji Chiba, JP 53 491
KIJIMA, Takeshi Chiba, JP 167 1581

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