LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT

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Aug 20, 2015
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Feb 17, 2015
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Feb 17, 2014

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A layer structure for a micromechanical component, having:

a first layer, which is usable both for an electrical wiring of the component and as electrode of the component; anda second layer which is resistant to oxide etching and is disposed below the first layer, the second layer being formed essentially in one plane.

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ROBERT BOSCH GMBH	POSTFACH 30 02 20 STUTTGART DE-70442

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Inventor Name	Address	# of filed Patents	Total Citations
GROSSE, Axel	Pfullingen, DE	10	29
STAHL, Heiko	Reutlingen, DE	25	104

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LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT

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United States of America Patent

14624130

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14624130

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