PDMS imprinting stamp with embedded flexure
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United States of America Patent
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Nov 24, 2015
Grant Date -
Aug 20, 2015
app pub date -
Feb 17, 2014
filing date -
Nov 20, 2013
priority date (Note) -
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Abstract
A non-deformable patterned template includes a stable mesh, wherein the stable mesh is resistant to deformation; a polymer sheet with the stable mesh embedded therein, wherein the polymer sheet is formed using a liquid polymer adapted to receive the stable mesh, and wherein the liquid polymer is cured after the stable mesh has been placed within the liquid polymer; and a surface pattern on at least one face of the polymer sheet.
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