Method and systems to control optical transmissivity of a polish pad material
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United States of America Patent
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Jul 17, 2018
Grant Date -
Aug 20, 2015
app pub date -
Feb 19, 2015
filing date -
Apr 2, 2012
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Abstract
A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.
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