Methods and apparatus for laser produced plasma EUV light source
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United States of America Patent
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Feb 23, 2016
Grant Date -
Aug 13, 2015
app pub date -
Feb 10, 2014
filing date -
Feb 10, 2014
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Abstract
A system for producing EUV light using a drive laser beam to irradiate a stream of material droplets. There is included a monitoring system for monitoring at least one of drive laser beam reflection from the drive laser beam and EUV radiation pulses and producing a detector signal, the detector signal being a pulse train. There is also included an arrangement for analyzing the detector signal to ascertain whether there exists at least one satellite droplet in the stream of material droplets.
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