MEMS electrostatic actuator
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United States of America Patent
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Feb 16, 2016
Grant Date -
Aug 13, 2015
app pub date -
Apr 21, 2015
filing date -
Sep 13, 2011
priority date (Note) -
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Abstract
A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.
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