INERTIAL DRIVE ACTUATOR
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United States of America Patent
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Apr 21, 2015
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Oct 23, 2012
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Abstract
An inertial drive actuator includes a displacement unit that generates a small displacement in a first direction and in a second direction opposite to the first direction, a plurality of coils that generate a magnetic flux in a direction different from the displacement unit, a mover having a surface facing at least one surface of the plurality of coils and a first yoke that concentrates the magnetic flux generated by the coils to a predetermined location, a detection unit that detects electrical signals of the plurality of coils that represent changes in the magnetic flux in the neighborhood of the coils depending on positional relationship between the mover and the plurality of coils, and a determination unit that determines the position of the mover based on an output of the detection unit.
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