ZERO-BIAS CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS AND FABRICATION METHOD THEREOF
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United States of America Patent
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Aug 13, 2015
app pub date -
Jul 21, 2014
filing date -
Feb 7, 2014
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Abstract
The present invention provides a zero-bias capacitive micromachined ultrasonic transducer element, comprising: a substrate having a lower electrode formed therein; a membrane structure that structurally supports an upper electrode over the lower electrode, wherein the upper electrode has at least one protruding part thereunder; a cavity between the substrate and the membrane structure; and a polymeric material coated on an inner surface of the cavity. The fabrication method of the zero-bias capacitive micromachined ultrasonic transducer element is also provided.
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