METHODS AND APPARATUS FOR VERTICALLY ORIENTING SUBSTRATE PROCESSING TOOLS IN A CLEAN SPACE

United States of America Patent

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Aug 13, 2015
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Apr 17, 2015
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Jun 18, 2005

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Abstract

The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.

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FUTRFAB INC	4 CROTTY LANE NEW WINDSOR NY 12553

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Inventor Name	Address	# of filed Patents	Total Citations
Flitsch, Frederick A	New Windsor, US	253	4985

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METHODS AND APPARATUS FOR VERTICALLY ORIENTING SUBSTRATE PROCESSING TOOLS IN A CLEAN SPACE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14689980

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14689980

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