SYSTEM AND METHOD FOR LEAK INSPECTION
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United States of America Patent
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Aug 13, 2015
app pub date -
Sep 4, 2013
filing date -
Sep 4, 2012
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Abstract
A leak inspection system includes: an ionizing unit that ionizes components included in a gas; a detection unit that detects the ionized components; a container that houses an object subjected to a leak inspection; a first path that supplies a first gas having a first component that is not ionized by the ionizing unit to one out of the object and the container and supplies gas inside one out of the object and the container via the ionizing unit to the detection unit; and a determination unit that determines, from a detection result of the detection unit, leakage of a second gas, which has a second component that is ionized by the ionizing unit, from inside another out of the object and the container. A leak inspection system with high detection precision can be provided at low cost.
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