OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS
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United States of America Patent
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Issued Date -
Aug 13, 2015
app pub date -
Feb 3, 2015
filing date -
Feb 7, 2014
priority date (Note) -
Abandoned
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Abstract
An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. In addition, a light reflection prevention structure or a diffusion structure is provided to the bottom surface of the probe cover. Light reflected from the work piece is prevented from reflecting off the bottom surface by the reflection prevention structure, or the reflected light is diffused by the diffusion structure. Accordingly, an occurrence of an erroneous value in received light distribution due to second order reflected light can be inhibited.
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