GRAZING INCIDENCE INTERFEROMETER
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United States of America Patent
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Aug 13, 2015
app pub date -
Feb 9, 2015
filing date -
Feb 13, 2014
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Abstract
A grazing incidence interferometer includes: a graduated instrument showing an index at an overlapping area where adjacent ones of measurement areas overlap with each other; and a measuring unit including: an image acquiring unit that acquires interference fringe images at image-capturing positions for the measurement areas, individually, the interference fringe images each showing each of the measurement areas and the index; and a profile computing unit that combines measurement results based on the interference fringe images of the adjacent ones of the measurement areas in a manner that images of the index included in common in the interference fringe images of the adjacent ones of the measurement areas are superimposed on each other.
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