SUPPORT FOR MEMS COVER

United States of America Patent

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Issued Date
Aug 13, 2015
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Feb 7, 2014
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Feb 7, 2014

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Abstract

Embodiments related to a MEMS device in which a support structure for supporting a cover is formed in a cavity are described and depicted.

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Patent Owner	Address
INFINEON TECHNOLOGIES AG	AM CAMPEON 1-15 NEUBIBERG 85579

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Inventor Name	Address	# of filed Patents	Total Citations
SANTA, Thomas	Seeboden, AT	7	9

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11.5 Year Payment	$7400.00	$3700.00	$1850.00	Feb 13, 2027

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Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
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Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
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Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

SUPPORT FOR MEMS COVER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14175970

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14175970

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Abstract

First Claim

Family

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