ADHERED SUBSTANCES REMOVING DEVICE, AND VAPOR DEPOSITION SYSTEM AND REMOVAL METHOD USING SUCH ADHERED SUBSTANCES REMOVING DEVICE
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United States of America Patent
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Issued Date -
Aug 13, 2015
app pub date -
Nov 15, 2012
filing date -
Nov 15, 2012
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Abstract
Provided is an adhered substances removing device that removes adhered substances adhered to a workpiece. The adhered substances removing device includes: a particulate injecting unit that faces the workpiece, injects a particulate, which sublimates in an atmosphere toward the workpiece, and releases adhered substances from the workpiece; and a dry gas supplying unit that supplies dry gas to the atmosphere in which the particulate is injected onto the workpiece by the particulate injecting unit.
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