VERTICAL GALLIUM NITRIDE SCHOTTKY DIODE
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United States of America Patent
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Issued Date -
Aug 6, 2015
app pub date -
Jan 28, 2015
filing date -
Feb 5, 2014
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Abstract
A Schottky diode may include a semiconductor substrate having first and second opposing surfaces, and a buffer layer over the first surface of the semiconductor substrate. The Schottky diode may include a first doped GaN layer over the buffer layer and having first and second opposing surfaces, the second surface of the first doped GaN layer being adjacent the buffer layer, and a second doped GaN layer over the second surface of the first doped GaN layer and having a dopant concentration level less than a dopant concentration level of the first doped GaN layer. The buffer layer, the first doped GaN layer, and the second doped GaN layer may define an opening. The Schottky diode may include a first metallization layer being coupled to the semiconductor substrate and to the first surface of the first doped GaN layer and being in the opening.
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