STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
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United States of America Patent
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app pub date -
Feb 2, 2015
filing date -
Nov 10, 2003
priority date (Note) -
Abandoned
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Abstract
A substrate transport apparatus having a drive section, an articulated arm operably connected to the drive section, and an end effector connected to the articulated arm, the end effector being configured for holding a substrate thereon and transporting the substrate through articulation of the articulated arm. The end effector is a substantially flat and elongated member, depending from the articulated arm at a base end of the end effector, and extending longitudinally so that the end effector engages edges of the substrate on both proximal and distal sides with respect to the base end. The end effector has a lateral cross section that tapers in a longitudinal portion of the end effector extending between the base end and a distal end of the end effector, the lateral cross section being tapered, along the longitudinal portion, in at least two different directions that are angled and crossing each other.
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