COOLING SYSTEM FOR AT LEAST ONE SYSTEM COMPONENT OF AN OPTICAL SYSTEM FOR EUV APPLICATIONS AND SYSTEM COMPONENT OF THIS TYPE AND OPTICAL SYSTEM OF THIS TYPE
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United States of America Patent
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Aug 6, 2015
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Apr 13, 2015
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Nov 29, 2012
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A cooling system for at least one system component of an optical system for EUV applications comprises at least one cooling channel and a cooling medium for passing through the at least one cooling channel, absorbing heat from the at least one system component and for carrying off the heat. The cooling medium comprises a dielectric fluid, excluding pure water, 1,1,1,2-Tetrafluoroethane (R134a) and Chlorodifluoro-methane (R22).The dielectric fluid comprises a liquid phase at an operating pressure below 10 bar and in a temperature range of approximately 10° C. to approximately 50° C.
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