ELECTROSTATIC CAPACITANCE SENSOR AND METHOD FOR CORRECTING NON-LINEAR OUTPUT
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United States of America Patent
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app pub date -
Apr 8, 2015
filing date -
Apr 2, 2013
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Abstract
An electrostatic capacitance sensor, including a movable electrode, a support, a beam member movably attaching the movable electrode to the support, a first fixed electrode facing the movable electrode from a first direction, a second fixed electrode facing the movable electrode from a second direction different from the first direction, a detection unit that detects a change of first capacitance charged between the movable electrode and the first fixed electrode, and a change of second capacitance charged between the movable electrode and the second fixed electrode, a hardware computing device, and a storage medium having program instructions store thereon. The execution of the program instructions by the hardware computing device causes the electrostatic capacitance sensor to provide the function of a correction unit that corrects a detection result of the detection unit, and generates an acceleration signal to indicate acceleration using the corrected detection result.
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