ALD Coating System and Method for Operating an ALD Coating System
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Jan 23, 2015
filing date -
Jan 24, 2014
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An ALD coating system includes a storage container for an organometallic starting material and an intermediate container for a partial amount of the organometallic starting material. The intermediate container has a device for heating up the organometallic starting material. The intermediate container is arranged downstream of the storage container by way of a first multiway valve. The intermediate container is connected to a process chamber by way of a second multiway valve and to a collecting chamber by way of a third multiway valve.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully