MULTI-CHANNEL PYROLYSIS TUBES, MATERIAL DEPOSITION EQUIPMENT INCLUDING THE SAME AND ASSOCIATED METHODS
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United States of America Patent
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Issued Date -
Jul 30, 2015
app pub date -
Aug 12, 2014
filing date -
Jan 28, 2014
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Abandoned
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Abstract
A pyrolysis tube for use with a material deposition system includes a plurality of channels. The channels may be defined by internal elements of the pyrolysis tube, or by internal elements that form an insert for a conventionally configured pyrolysis tube. One or more of the channels may extend straight through the pyrolysis tube, providing a direct line of sight through the pyrolysis tube. Material deposition systems that include such an insert or pyrolysis tube are also disclosed, as are methods for efficiently pyrolyzing precursor materials at temperatures that are reduced relative to conventional pyrolysis temperatures and/or at rates that are increased relative to conventional pyrolysis rates.
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