Polishing-Material Reclamation Method
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United States of America Patent
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Jul 30, 2015
app pub date -
Jul 24, 2013
filing date -
Jul 25, 2012
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Abstract
Method to obtain a highly pure reclaimed polishing material from a polishing-material slurry including already used polishing material. A polishing is reclaimed from a polishing-material slurry by undergoing: recovering in step (A) a polishing-material slurry including already used polishing material; adding in step (B) an alkali earth metal-containing metal salt to the recovered polishing-material slurry to cause the polishing material to agglomerate, and the polishing material is separated from the mother liquor and concentrated; the polishing material, having had been separated and concentrated, is subjected in step (C) to solid-liquid separation, and recovered; and using in step (D) a magnetic filter to filter and remove metal particles included in the polishing-material slurry. Step (D) is performed at the same time as step (B) or step (C), or performed after either step (A), step (B), or step (C).
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