MEMS GAS SENSING DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
Jul 30, 2015
app pub date -
Jan 29, 2015
filing date -
Jan 29, 2014
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A microelectromechanical system (MEMS) gas sensing device includes a substrate, an oxide layer, a heating unit, a thermal-conductive metal layer, a passivation layer, and a sensor layer. The substrate includes a first cavity. The oxide layer has a first surface and a second surface opposite to the first surface, is on the substrate, and covers on the first cavity. The first surface contacts the substrate. The heating unit is in the oxide layer and adjacent to the first surface of the oxide layer. The thermal-conductive metal layer is between the heating unit and the second surface of the oxide layer. The passivation layer is on the second surface of the oxide layer and includes at least one via. The sensor layer is on the passivation layer and electrically connected to the thermal-conductive metal layer through the at least one via.
First Claim
Other Claims data not available