HIGH PERFORMANCE FINFET
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United States of America Patent
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app pub date -
Mar 22, 2014
filing date -
Nov 14, 2013
priority date (Note) -
Abandoned
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Abstract
A FinFET is described having first, second, and third pluralities of fins with gate structures and source and drain regions formed on the fins so that PMOS transistors are formed on the first plurality of fins, NMOS transistors are formed on the second plurality and PMOS transistors are formed on the third plurality. In one embodiment, the first and second pluralities of fins are made of strained silicon; and the third plurality of fins is made of a material such as germanium or silicon germanium that has a higher hole mobility than strained silicon. In a second embodiment, the first plurality of fins is made of silicon, the second plurality of strained silicon, germanium or a III-V compound; and the third plurality is made of germanium or silicon germanium.
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