SUSCEPTOR, CRYSTAL GROWTH APPARATUS, AND CRYSTAL GROWTH METHOD

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United States of America Patent

APP PUB NO 20150206785A1
SERIAL NO

14417329

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Abstract

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A growth layer is uniformly grown on a substrate which is mounted on a susceptor. With a lower plate of the susceptor, at the outer periphery of a substrate mounting part, an outer periphery projection part, which is higher than the substrate mounting part, is formed around the substrate mounting part. Therefore, the substrate mounting part provides a bottom face of a recessed part formed within the lower plate, the substrate being mounted in this recessed part. In other words, the lower plate is provided with such a geometry that the substrate is fitted into the recessed part surrounded by the outer periphery projection part.

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Patent Owner(s)

Patent OwnerAddress
DOWA ELECTRONICS MATERIALS CO LTDTOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Higo, Masaaki Tokyo, JP 2 4
Miyashita, Masahito Tokyo, JP 10 73

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