Surface Cleaning Method and Apparatus Using Surface Acoustic Wave Devices

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United States of America Patent

APP PUB NO 20150206738A1
SERIAL NO

14159970

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus, system, and method for cleaning surfaces is presented. One embodiment of the system includes an array of surface acoustic wave (SAW) transducers coupled to a substrate. The system may include a positioning mechanism coupled to at least one of a target surface or the array of SAW transducers, and configured to position the array of SAW transducers within an effective cleaning distance of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of SAW transducers to the target surface. The system may further include a controller coupled to the array of SAW transducers and configured to activate the array of SAW transducers. At least one of the SAW transducers may be formed to focus cleaning liquid on a focal point and jet cleaning liquid in a direction substantially out of the place of the SAW transducer.

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Patent Owner(s)

Patent OwnerAddress
SEMATECH INC2706 MONTOPOLIS DRIVE AUSTIN TX 78741

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rastegar, Abbas Schenectady, US 20 137

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