Supply Container for a Coating Installation and Coating Installation
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United States of America Patent
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Issued Date -
Jul 23, 2015
app pub date -
Jul 19, 2013
filing date -
Sep 5, 2012
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Abstract
A storage vessel is provided for starting material for producing a layer on a substrate by means of a growth process in a coating installation. The storage vessel has an internal volume for the starting material, in which there is a temperature-compensating material which is inert with respect to the starting material. Furthermore, a coating installation having a storage vessel is specified.
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