POLISHING PAD, POLISHING APPARATUS AND METHOD FOR MANUFACTURING POLISHING PAD
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
N/A
app pub date -
Jan 15, 2015
filing date -
Jan 17, 2014
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Non-US Coverage
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Abstract
The present invention relates to a polishing pad comprising a buffer sheet containing a pressure distribution sheet. The invention also relates to a polishing apparatus and a method for manufacturing a polishing pad.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
SAN FANG CHEMICAL INDUSTRY CO LTD | 402 FENGJEN RD JENWU DIST KAOHSIUNG CITY |
International Classification(s)

- 2015 Application Filing Year
- B24B Class
- 630 Applications Filed
- 508 Patents Issued To-Date
- 80.64 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
FENG, CHUNG-CHIH | Kaohsiung City, TW | 112 | 308 |
# of filed Patents : 112 Total Citations : 308 | |||
HUNG, YUNG-CHANG | Kaohsiung City, TW | 45 | 119 |
# of filed Patents : 45 Total Citations : 119 | |||
LIU, WEI-TE | Kaohsiung City, TW | 10 | 28 |
# of filed Patents : 10 Total Citations : 28 | |||
WANG, CHUN-TA | Kaohsiung City, TW | 13 | 25 |
# of filed Patents : 13 Total Citations : 25 | |||
YAO, I-PENG | Kaohsiung City, TW | 79 | 189 |
# of filed Patents : 79 Total Citations : 189 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 1 Citation Count
- B24B Class
- 16.04 % this patent is cited more than
- 10 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 23, 2027 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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